TEGAL
Part List
[ms excel version]
| OEM | PART NUMBER | PART DESCRIPTION |
| Tegal | 37-221-001 | Upper Electrode |
| Tegal | 37-221-003 | Upper Electrode |
| Tegal | 37-222-002 | Cooling Plate |
| Tegal | 39-680-003 | Upper Electrode |
| Tegal | 39-733-004 | Tegal 901e lower electode |
| Tegal | 39-735-003 | Tegal 903e lower electrode |
| Tegal | 39-735-004 | Tegal 903e lower electrode |
| Tegal | 39-741-009 | Tegal 903e lower electrode |
| Tegal | 39-741-010 | Tegal 903e lower electrode |
| Tegal | 39-741-026 | Tegal 903e lower electrode |
| Tegal | 39-927-007 | Tegal 903e lower electrode |
| Tegal | 39-927-008 | Tegal 903e lower electrode |