LAM
Part List
[ms excel version]
| OEM | PART NUMBER | PART DESCRIPTION |
| LAM | 713-018426-369 | Insert, Vespel Ring |
| LAM | 713-028487-001 | Confindment Vespel Ring |
LAM |
715-007469-002 | Lower Electrode 6", 4 pin |
LAM |
715-008721-001 | Electrode 6" |
| LAM | 715-011531-008 | Electrode 6" |
| LAM | 715-011531-009 | Electrode 8" |
| LAM | 715-011531-014 | Electrode 8" |
| LAM | 715-011531-015 | Electrode 6" |
| LAM | 715-011531-102 | Electrode 6" |
| LAM | 715-011640-005 | Focus Ring 4" |
| LAM | 715-011640-006 | Focus Ring 6", Rainbow |
| LAM | 715-011673-105 | Lower Electrode 5" |
| LAM | 715-011746-141 | Plate Wafer Clamp 4" |
| LAM | 715-011746-151 | Plate Wafer Clamp 5" |
| LAM | 715-011746-161 | Plate Wafer Clamp 6" |
| LAM | 715-018991-206 | Electrode Upper 6" |
| LAM | 715-018991-208 | Electrode Upper 8" |
| LAM | 715-018991-006 | Electrode Upper 8" |
| LAM | 715-028087-005 | Shroud 6" 2 mil hard |
| LAM | 715-028559-001 | Showerhead 6" |
| LAM | 715-028606-161 | Wafer Clamp 6" |
| LAM | 715-030320-001 | BSR Injection Ring |
| LAM | 715-28608-161 | Non-Contact Wafer Clamp |
| LAM | 715-31752-206 | Electrode Lower 6" |
| LAM | 715-31752-208 | Electrode Lower 8" |
| LAM | 715-330000-090 | Gas Injection Ring |
| LAM | 715-330135-001 | BSR Injection Ring |
| LAM | 715-330984-001 | BSR Injection Ring |
LAM |
715-330987-001 | BSR Injection Ring |
| LAM | 715-11986-108 | Lower Electrode |