AMAT
Part List
[ms excel version]
| OEM | PART NUMBER | PART | DESCRIPTION |
| AMAT | 0020-00991 | Hex Cover | 150mm |
| AMAT | 0020-04018 | Pedestal | 150mm |
| AMAT | 0020-04257 | Pedestal | 125mm |
| AMAT | 0020-06231 | Hex Cover | 125mm |
| AMAT | 0020-06447 | Insulator Cap | |
| AMAT | 0020-06754 | Hex Cover | 100mm |
| AMAT | 0020-06997 | Pedestal | 125mm |
| AMAT | 0020-10117 | TEOS Perf Plate | 200mm |
| AMAT | 0020-10119 | Perf Plate | 150mm |
| AMAT | 0020-10120 | TEOS Perf Plate | 150mm |
| AMAT | 0020-10122 | Perf Plate | 125mm |
| AMAT | 0020-10204 | Susceptor Plate | 200mm |
| AMAT | 0020-10936 | Blocker Plate | 200mm |
| AMAT | 0020-10771 | TEOS Perf Plate | 150mm |
| AMAT | 0020-23811 | Collimator | .625 thick |
| AMAT | 0020-24812 | Collimator | .750 thick |
| AMAT | 0020-30086 | Perf Plate | 150mm |
| AMAT | 0020-30195 | Cover | |
| AMAT | 0020-30111 | Blocker Plate | 200mm |
| AMAT | 0020-30406 | Perf Plate | 150mm |
| AMAT | 0020-30407 | Perf Plate | 200mm |
| AMAT | 0020-30580 | Blocker Plate | 150mm |
| AMAT | 0020-30797 | Perf Plate | 200mm |
| AMAT | 0020-30816 | Gas Distribution Plate | 13 hole |
| AMAT | 0020-30919 | Susceptor Plate | 200mm |
| AMAT | 0020-31088 | Susceptor Plate | 200mm |
| AMAT | 0020-31488 | Gas Distribution Plate | 13 hole |
| AMAT | 0020-31490 | Gas Distribution Plate | 37 hole |
| AMAT | 0020-31492 | Gas Distribution Plate | 101 hole |
| AMAT | 0020-31493 | Gas Distribution Plate | 133 hole |
| AMAT | 0020-31547 | Gas Distribution Plate | 101 hole |
| AMAT | 0020-31548 | Gas Distribution Plate | 133 hole |
| AMAT | 0020-31620 | Susceptor Plate | 200mm |
| AMAT | 0020-31789 | Cover | |
| AMAT | 0020-31804 | Gas Distribution | Plate 80 hole |
| AMAT | 0020-31831 | Chamber Lid | |
| AMAT | 0020-32036 | Blocker Plate | 200mm |
| AMAT | 0020-32259 | Gas Distribution Plate | 119 hole |
| AMAT | 0020-32260 | Gas Distribution Plate | 37 hole |
| AMAT | 0020-32262 | Gas Distribution Plate | 133 hole |
| AMAT | 0020-32263 | Gas Distribution Plate | 145 hole |
| AMAT | 0020-32952 | Susceptor Plate | 200mm |
| AMAT | 0020-33538 | Perf Plate | |
| AMAT | 0020-34293 | Chamber Lid | |
| AMAT | 0020-34297 | Chamber Lid | |
| AMAT | 0020-34444 | Face Plate | 200mm |
| AMAT | 0020-34445 | Blocker Plate | 200mm |
| AMAT | 0020-42285 | Blocker Plate | 200mm |
| AMAT | 0020-42287 | Perf Plate | 200mm |
| AMAT | 0020-60007 | Susceptor Plate | 125mm |
| AMAT | 0020-60033 | Susceptor Plate | 150mm |
| AMAT | 0021-00041 | Face Plate | 200mm |
| AMAT | 0021-01569 | Blocker Plate | 200mm |
| AMAT | 0021-01572 | Face Plate | 200mm |
| AMAT | 0021-02306 | Face Plate | 200mm |
| AMAT | 0021-03637 | Face Plate | |
| AMAT | 0021-09007 | Chamber Lid | |
| AMAT | 0021-09008 | Chamber Lid | |
| AMAT | 0021-09909 | Face Plate | 200mm |
| AMAT | 0021-09914 | Blocker Plate | 200mm |
| AMAT | 0021-38119 | Face Plate | 200mm |