| Tokyo Electron Limited Parts | |||
| TEL | TECH-STAR PART NUMBER | OEM PART NUMBER | DESCRIPTION |
| TEL | TSI-T1429-15 | 1D10-201429-15 | UPPER ELECTRODE |
| TEL | TSI-T1588-12 | 1D10-201588-12 | UPPER ELECTRODE W/MONITOR |
| TEL | TSI-T2204-12 | 1D10-202204-12 | UPPER ELECTRODE, VESPEL INSERT, W/MONITOR |
| TEL | TSI-T2177-12 | 1D10-202177-12 | UPPER ELECTRODE, VESPEL INSERT |
| TEL | TSI-T0854-15 | 1D10-100854-15 | DRM2 BAFFLE PLATE |
| TEL | TSI-T1551-11 | 1D10-101551-11 | BAFFLE PLATE |
| TEL | TSI-T2988-11 | 1D10-202988-11 | DRM2 COVER BELLOW |
| TEL | TSI-T3124-21 | 1D10-303124-21 | DRM2 DEPO SHIELD |