Tegal Parts
| Tegal | TECH-STAR PART NUMBER | OEM PART NUMBER | PART DESCRIPTION |
| TGL | TSI-TG21001 | 37-221-001 | Upper Electrode |
| TGL | TSI-TG21003 | 37-221-003 | Upper Electrode |
| TGL | TSI-TG22002 | 37-222-002 | Cooling Plate |
| TGL | TSI-TG80003 | 39-680-003 | Upper Electrode |
| TGL | TSI-TG33004 | 39-733-004 | Tegal 901e lower electode |
| TGL | TSI-TG35003 | 39-735-003 | Tegal 903e lower electrode |
| TGL | TSI-TG35004 | 39-735-004 | Tegal 903e lower electrode |
| TGL | TSI-TG41009 | 39-741-009 | Tegal 903e lower electrode |
| TGL | TSI-TG41010 | 39-741-010 | Tegal 903e lower electrode |
| TGL | TSI-TG41026 | 39-741-026 | Tegal 903e lower electrode |
| TGL | TSI-TG27007 | 39-927-007 | Tegal 903e lower electrode |
| TGL | TSI-TG27008 | 39-927-008 | Tegal 903e lower electrode |