LAM Research Parts

OEM TECH-STAR PART NUMBER OEM PART NUMBER Description
    LAM TSI-L8426-369 713-018426-369 Insert, Vespel Ring
    LAM TSI-L8487-001 713-028487-001 Confindment Vespel Ring
    LAM TSI-L7469-002 715-007469-002 Lower Electrode 6", 4 pin
    LAM TSI-L8721-001 715-008721-001 Electrode 6"
    LAM TSI-L1531-008 715-011531-008 Electrode 6"
    LAM TSI-L1531-009 715-011531-009 Electrode 8"
    LAM TSI-L1531-014 715-011531-014 Electrode 8",
    LAM TSI-L1531-015 715-011531-015 Electrode 6"
    LAM TSI-L1531-102 715-011531-102 Electrode 6"
    LAM TSI-L1640-005 715-011640-005 Focus Ring 4"
    LAM TSI-L1640-006 715-011640-006 Focus Ring 6", Rainbow
    LAM TSI-L1673-105 715-011673-105 Lower Electrode 5",
    LAM TSI-L1746-141 715-011746-141 Plate Wafer Clamp 4"
    LAM TSI-L1746-151 715-011746-151 Plate Wafer Clamp 5"
    LAM TSI-L1746-161 715-011746-161 Plate Wafer Clamp 6"
    LAM TSI-L8991-206 715-018991-206 Electrode Upper 6"
    LAM TSI-L8991-208 715-018991-208 Electrode Upper 8"
    LAM TSI-L8991-006 715-018991-006 Electrode Upper 8"
    LAM TSI-L8087-005 715-028087-005 Shroud 6" 2 mil hard
    LAM TSI-L8559-001 715-028559-001 Showerhead 6"
    LAM TSI-L8606-161 715-028606-161 Wafer Clamp 6"
    LAM TSI-L0320-001 715-030320-001 BSR Injection Ring
    LAM TSI-L8608-161 715-28608-161 Non-Contact Wafer Clamp
    LAM TSI-L1752-206 715-31752-206 Electrode Lower 6"
    LAM TSI-L1752-208 715-31752-208 Electrode Lower 8"
    LAM TSI-L0000-090 715-330000-090 Gas Injection Ring
    LAM TSI-L0135-001 715-330135-001 BSR Injection Ring
    LAM TSI-L0984-001 715-330984-001 BSR Injection Ring
    LAM TSI-L0987-001 715-330987-001 BSR Injection Ring
    LAM TSI-L1986-108 715-11986-108 Lower Electrode