Applied Materials Parts
|
OEM |
TECH-STAR PART NUMBER | OEM PART NUMBER |
PART DESCRIPTION |
| AMAT |
TSI-A00991 |
0020-00991 | Hex Cover 150mm |
| AMAT | TSI-A04018 | 0020-04018 | Pedestal 150mm |
| AMAT | TSI-A04257 | 0020-04257 | Pedestal 125mm |
| AMAT | TSI-A06231 | 0020-06231 | Hex Cover 125mm |
| AMAT | TSI-A06447 | 0020-06447 | Insulator Cap |
| AMAT | TSI-A06754 | 0020-06754 | Hex Cover 100mm |
| AMAT | TSI-A06997 | 0020-06997 | Pedestal 125mm |
| AMAT | TSI-A10117 | 0020-10117 | TEOS Perf Plate 200mm |
| AMAT | TSI-A10119 | 0020-10119 | Perf Plate 150mm |
| AMAT | TSI-A10120 | 0020-10120 | TEOS Perf Plate 150mm |
| AMAT | TSI-A10122 | 0020-10122 | Perf Plate 125mm |
| AMAT | TSI-A10204 | 0020-10204 | Susceptor Plate 200mm |
| AMAT | TSI-A10936 | 0020-10936 | Blocker Plate 200mm |
| AMAT | TSI-A10771 | 0020-10771 | TEOS Perf Plate 150mm |
| AMAT | TSI-A23811 | 0020-23811 | Collimator .625 thick |
| AMAT | TSI-A24812 | 0020-24812 | Collimator .750 thick |
| AMAT | TSI-A30086 | 0020-30086 | Perf Plate 150mm |
| AMAT | TSI-A30195 | 0020-30195 | Cover |
| AMAT | TSI-A30111 | 0020-30111 | Blocker Plate 200mm |
| AMAT | TSI-A30406 | 0020-30406 | Perf Plate 150mm |
| AMAT | TSI-A30407 | 0020-30407 | Perf Plate 200mm |
| AMAT | TSI-A30580 | 0020-30580 | Blocker Plate 150mm |
| AMAT | TSI-A30797 | 0020-30797 | Perf Plate 200mm |
| AMAT | TSI-A30816 | 0020-30816 | Gas Distribution Plate 13 hole |
| AMAT | TSI-A30919 | 0020-30919 | Susceptor Plate 200mm |
| AMAT | TSI-A31088 | 0020-31088 | Susceptor Plate 200mm |
| AMAT | TSI-A31488 | 0020-31488 | Gas Distribution Plate 13 hole |
| AMAT | TSI-A31490 | 0020-31490 | Gas Distribution Plate 37 hole |
| AMAT | TSI-A31492 | 0020-31492 | Gas Distribution Plate 101 hole |
| AMAT | TSI-A31493 | 0020-31493 | Gas Distribution Plate 133 hole |
| AMAT | TSI-A31547 | 0020-31547 | Gas Distribution Plate 101 hole |
| AMAT | TSI-A31548 | 0020-31548 | Gas Distribution Plate 133 hole |
| AMAT | TSI-A31620 | 0020-31620 | Susceptor Plate 200mm |
| AMAT | TSI-A31789 | 0020-31789 | Cover |
| AMAT | TSI-A31804 | 0020-31804 | Gas Distribution Plate 80 hole |
| AMAT | TSI-A31831 | 0020-31831 | Chamber Lid |
| AMAT | TSI-A32036 | 0020-32036 | Blocker Plate 200mm |
| AMAT | TSI-A32259 | 0020-32259 | Gas Distribution Plate 119 hole |
| AMAT | TSI-A32260 | 0020-32260 | Gas Distribution Plate 37 hole |
| AMAT | TSI-A32262 | 0020-32262 | Gas Distribution Plate 133 hole |
| AMAT | TSI-A32263 | 0020-32263 | Gas Distribution Plate 145 hole |
| AMAT | TSI-A32952 | 0020-32952 | Susceptor Plate 200mm |
| AMAT | TSI-A33538 | 0020-33538 | Perf Plate |
| AMAT | TSI-A34292 | 0020-34293 | Chamber Lid |
| AMAT | TSI-A34297 | 0020-34297 | Chamber Lid |
| AMAT | TSI-A34444 | 0020-34444 | Face Plate 200mm |
| AMAT | TSI-A34445 | 0020-34445 | Blocker Plate 200mm |
| AMAT | TSI-A42285 | 0020-42285 | Blocker Plate 200mm |
| AMAT | TSI-A42287 | 0020-42287 | Perf Plate 200mm |
| AMAT | TSI-A60007 | 0020-60007 | Susceptor Plate 125mm |
| AMAT | TSI-A60033 | 0020-60033 | Susceptor Plate 150mm |
| AMAT | TSI-A00041 | 0021-00041 | Face Plate 200mm |
| AMAT | TSI-A01569 | 0021-01569 | Blocker Plate 200mm |
| AMAT | TSI-A01572 | 0021-01572 | Face Plate 200mm |
| AMAT | TSI-A02306 | 0021-02306 | Face Plate 200mm |
| AMAT | TSI-A03637 | 0021-03637 | Face Plate |
| AMAT | TSI-A09007 | 0021-09007 | Chamber Lid |
| AMAT | TSI-A09008 | 0021-09008 | Chamber Lid |
| AMAT | TSI-A09909 | 0021-09909 | Face Plate 200mm |
| AMAT | TSI-A09914 | 0021-09914 | Blocker Plate 200mm |
| AMAT | TSI-A38119 | 0021-38119 | Face Plate 200mm |